Confessions of a module builder - and I've built 20 with some of the oldest (25 yrs old) modules still in service. Since modules have to be moved from storage to a venue, weight is always an issue, so a thin deck is the starting point. 1/4 Luan is readily available but I admit I have stock purchased years ago when the voids and de-lamination was minimal. I would still stick with 1/4" to 3/8" for decks but will probably buy birch in the future to avoid quality issues. Where you have to walk on the layout for access, 1/2" is adequate to support my bulk. Deck flexing is solved with cross bracing (joists). I use 1x3s for framing, 1x2s for cross bracing. Boards are picked through at the big box stores to get straight pieces and stored to dry further. Any twist that develops relegates the board to being ripped and used for short cross brace pieces. 2x2s are good for legs. Conclusion: thin decks with good cross bracing works well for layouts.
For a fixed layout, I would not recommend decks thicker than 1/2". I use 4x4 platforms for holiday train gardens. Half inch plywood, supported only at the edges of the 4 ft span, can be walked on.
Using 3/4" decks is overkill. You are not building a house to code capable of supporting a 140 lbs/sq ft live load. Your back will thank you for choosing a thinner deck.
+1 on using the Torx screws for frame assembly. I still use drywall screws to attach the deck to frames.